Optimising plasma treatment of surfaces

Kiel physicist demonstrates sensor for diagnosis and optimisation of plasma processes at the Hannover Messe

Plasma technology is used to treat surfaces in the industrial production of numerous electronic products and optical layers, for example with lenses for glasses. But the processes involved are complex and are influenced by numerous parameters. Appropriate diagnostics are required in order to better control these processes in practice. The Plasma Technology Workgroup at Kiel University (CAU) has developed a thermal sensor which measures the flow of energy between plasmas and the surface. The data for this key parameter assists with controlling technological plasma processes and scaling industrial coating systems. The workgroup from Kiel will present their sensor at this year's Hannover Messe from 1 to 3 April at the CAU booth (Hall 2, CO7).

A key factor which influences plasma processes is the flow of energy between plasmas and the surface. In order to measure such parameters, sensors which are suitable for industry are required. The passive thermal sensor has been developed within the Plasma Technology Workgroup led by Professor Holger Kersten. "Complex interactions occur between plasmas and surfaces. With our sensor, we want to determine these more precisely, in order to be able to better understand and control the processes," said Kersten. Through the plasma-induced temperature change in the sensor, the plasma’s energy transfer to the substrate surface can be determined. On the basis of the total energy measured, plasma processing for thin film deposition and surface activation can be optimised.

Due to the simple geometry of the passive thermal sensor, it can be utilised for plasma sources in both low-pressure as well as atmospheric pressure applications. The measuring instrument can be easily adapted to the real plasma environment, and also combined with other diagnostics. Thus, parameters can be specifically determined and modified, to optimise the efficiency and quality of industrial plants in which surfaces are treated with plasma processes.

From 1 - 3 April 2019, the group will be presenting their measuring technology and its potential applications at the Kiel University booth at the Hannover Messe (Hall 2, Research & Technology, booth C07). On Monday 1 April at 11am and 1pm, Kersten will deliver a presentation on the topic in English, titled "Energy flux measurements for plasma diagnostics and process optimization".

Key facts:
What?  Presentation: “Energy flux measurements for plasma diagnostics and process optimization”
Who?   Prof. Dr Holger Kersten, Plasma Technology Workgroup
When? The presentation will be held in English on Monday 1 April at 11am and 1pm. The thermal sensor is an additional exhibit and can be seen from 1 to 3 April
Where? CAU booth C07 in Hall 2 “Research & Technology”, exhibition grounds (Nord 2 entrance), 30521 Hanover

© AG Kersten

The thermal sensor developed by the Plasma Technology Workgroup measures energy flows between plasmas and surfaces, in order to optimise plasma processes in industry.

© Haacks, CAU

High-quality and efficient plasma processes play an increasingly important role in the semiconductor, thin-film and optical industry, as well as in medical technology.

CAU@Hannover Messe:
After 33 years, CEBIT and the Hannover Messe are joining forces. From 1 to 5 April, more than 6,000 exhibitors at the world's leading industrial trade show will present the latest developments in the fields of digitalisation, Industry 4.0 and research. Kiel University (CAU) is among these for the third time. In Hall 2 "Research & Technology", scientists from the true north will present 17 interdisciplinary and transdisciplinary research projects. In addition, 39 stage presentations will offer an over-the-shoulder perspective of current research projects on topics such as battery research, autonomous ship navigation or radar-based pollutant measurement procedures. Joint panel discussions with the Schleswig-Holstein Ministry of Education and Ministry of Economics, a parliamentary evening, and hands-on activities and experiments with the Kieler Forschungswerkstatt (Kiel Research Workshop) round off the offerings. Details can be found at www.uni-kiel.de/hannovermesse

Details, which are only a millionth of a millimetre in size: this is what the priority research area "Kiel Nano, Surface and Interface Science – KiNSIS" at Kiel University has been working on. In the nano-cosmos, different laws prevail than in the macroscopic world - those of quantum physics. Through intensive, interdisciplinary cooperation between physics, chemistry, engineering and life sciences, the priority research area aims to understand the systems in this dimension and to implement the findings in an application-oriented manner. Molecular machines, innovative sensors, bionic materials, quantum computers, advanced therapies and much more could be the result. More information at www.kinsis.uni-kiel.de


Scientific contact:
Professor Holger Kersten
Institute of Experimental and Applied Physics
0431 880-3872

Press contact:
Julia Siekmann
Science communication
Priority research area Kiel Nano, Surface and Interface Science (KiNSIS)